Low energy ion scattering spectroscopy (LEIS) uses noble gas ions to probe the outermost surface of samples. It allows the determination of the outmost atomic layer of materials and the elemental composition can be quantified with unprecedented accuracy. Using different noble gases (He, Ne, Ar), almost all elements can be analyzed and even distinguish between close masses (e.g., Au/Pt, Cr/Fe/Mn/Co/Ni). By applying a time-of-flight (Tof) mass filter the detection limit especially for light elements can be significantly improved.
Dynamic sputter depth profiling using an Ar+ sputter gun allows in combination with the inherent atomic resolution of LEIS, allows a layer-by-layer characterisation of the sample.
Combined with our analytical tools in the ELSA cluster, surface characterisation with atomic resolution as well as chemical analysis can be achieved.
Features attached directly to the UHV system:
Applications:
Sample requirements:
The following publications show examples of LEIS data measured at CEST:
CEST thanks the state of Lower Austria and the European Regional Development Fund for their financial support under grant number WST3-F-542638/004-2021.