LEIS Low Energy Ion Scattering

LEIS is a highly sensitive surface characterization technique. It allows the determination of the outmost atomic layer of materials and the elemental composition can be quantified with unprecedented accuracy. Combined with precision sputtering, LEIS can deliver also cross sections and layer-by-layer analysis. This is relevant for several applications such as semiconductor industry, corrosion, catalysis etc. Contact us if you want to learn more about the great potential of this technology.