In the glow discharge optical emission spectroscopy HF (GDOES-HF), argon atoms are ionized by means of high frequency in a hollow anode and accelerated in the direction of the sample (cathode). At the sample surface thereby atoms are knocked out and excited continuously. In the transition back to the ground state, characteristic light is emitted for each element, which is measured. Due to the continuous material removal, a depth profile analysis is possible.
Depth profile analysis:
TiN on steel substrate
electroless Ni-P coating on steel substrate
Cu/Cr/Ni-Multilayer on Si-Wafer